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AXETRIS

Product Description

Axetris is serving OEM customers with micro technology based (MEMS) infrared light sources, laser gas sensors, gas flow sensors & controllers and micro-optical components used in industrial, telecom, environmental, medical and automotive applications. Our multi-disciplinary and highly skilled engineering and manufacturing teams combine broad experience in design, manufacturing and metrology from MEMS component to advanced optical and electronic sensor modules. Axetris supports its customers with in-depth application know-how. Customers benefit from excellent product value, consistent high product quality and outstanding customer support. OEMs rely on Axetris worldwide as a competent partner for customer specific solutions from concept to volume production. Axetris is ISO 9001:2008 certified and ISO TS 16949 compliant and operates its own 6” to 8” wafer MEMS foundry for its own products and contract manufacturing for external customers. A wafer back end, a sensor assembly and calibration facility under clean room conditions completes the manufacturing infrastructure of Axetris.

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Additional Information

MICRO - OPTICS

Axetris micro-optics offering ranges from refractive micro-optic lenses and lens arrays to diffractive optical elements in silicon and fused silica, covering the entire wavelength range from UV to mid IR.

INFRARED SOURCES

Axetris IR sources are micro-machined, electrically modulated thermal infrared emitters featuring true blackbody radiation characteristics, low power consumption, high emissivity and a long lifetime. The patented design is based on a resistive heating element integrated onto a thin dielectric membrane which is suspended on a micro-machined silicon structure.

MASS FLOW DEVICES

Axetris is offering OEM Mass Flow Meter (MFM) and Controllers (MFC) for gases with outstanding value to the customer. The proprietary Platinum based MEMS chip technology guarantees excellent accuracy and repeatability in com-bination with a high speed and an extended dynamic range

LASER GAS DETECTION

Laser Gas Detection (LGD), based on Tunable Diode Laser Spectrometry (TDLS), provides a solution to many gas detection challenges in emission monitoring and process control. The technology offers unique advantages like precise optical, contact-less measurements, excellent target gas selectivity and sub ppm-level detectivity.

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